Borosilicate glass is renowned for its applications in Micro-Electro Mechanical Systems (MEMS), lab-on-chip devices, micro-pumps, and micro -valves due to its transparency, chemical resistance, and high strength-toweight ratio. The current study emphasizes the creation of crack -free micro-cavities in Borosilicate glass using Electrochemical Discharge Micro Machining (ECD mu M). Key parameters, such as voltage, electrolyte concentration, and nitrogen gas flow rate, have been optimized to influence material removal (MR) and tool wear (TW) through L20 experiments and the Response Surface Methodology. A modified Blackwidow Optimization (mBWO) strategy is introduced, iteratively addressing contrasting responses. Optimal outcomes, registering 2.206 mg of MR and - 1.372 mg of TW, were attained at settings of 119.66 V, 11.867 wt%, and 4.95 lit/min for voltage, electrolyte concentration, and nitrogen gas flow rate, respectively. The m-BWO demonstrated superior efficacy when compared to the Genetic Algorithm (GA), Particle Swarm Optimization (PSO), Firefly Algorithm (FF), and Cuckoo Algorithm. When juxtaposed against Grey Rational Analysis (GRA), its performance was notably superior. This strategic optimization has the potential to decrease electrolyte preparation costs in MEMS and Nanotechnology, while also endorsing eco-friendly machining practices that mitigate water and soil pollution.

来源平台：MATERIALS TODAY COMMUNICATIONS